Planar Solutions develops and manufactures CMP slurries used in the manufacture of leading edge microchips, with particular focus on copper and barrier CMP applications. Planar Solutions is focused on providing unparalleled value to our customers by utilizing our state of the art research and development capabilities, proven quality systems, and exceptional customer responsiveness.
Planar Solutions BSL8072 is an advanced low-selective copper barrier slurry platform, designed for the CMP of leading-edge devices. Exceptional removal rate tunability and ultra low defectivity support a wide variety of process and integration requirements. more