About Planar Solutions, LLC

Headquartered in Adrian, Michigan, Planar Solutions, LLC is a joint venture between FUJIFILM Electronic Materials – USA and Wacker Chemical for the production and sale of chemical mechanical planarization (CMP) slurries. With manufacturing and customer-support facilities in Adrian, Michigan, and Mesa, Arizona, Planar Solutions develops and manufactures advanced slurries and dispersions with a particular focus on the copper CMP process including copper and copper barrier applications. The Planar product line demonstrates superior chemical and dispersion stability and high post-CMP yields. Planar Solutions is also a leader in slurry technologies tailored for the integration of low-k dielectrics in advanced chips. Planar Solutions' slurries are currently used worldwide in high volume production for 130, 90 and 65nm copper technology nodes and are in qualification for the 45nm node.

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